Pollen Metrology

AI process-control software for semiconductor fabs and equipment makers, linking metrology, inspection and simulation data

Moirans, FranceFounded 2014pollen-software.comWebsite technologies

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Highlights

  • New on EvolcAdded 2026-10-29

About Pollen Metrology

Pollen Metrology develops Smart3, a software platform that connects multi-source industrial data, engineering expertise and AI for process control, from R&D to production. Its capabilities cover metrology and characterisation, defect inspection, and simulation and optimisation. Users can create custom data readers and plugins through a natural-language interface built on an LLM enriched with their own documentation.

The platform is sold to semiconductor fabs and fabless companies, equipment manufacturers, and companies in advanced packaging, displays and photonics, and advanced materials. Revenue comes from licences sized to each deployment, plus training through Pollen Academy, support and development services. Smart3 can be deployed on site, and an OEM and SDK offering lets equipment makers build their own applications and algorithms on the platform.

The company is headquartered in Moirans, France, and was founded on 25 September 2014. Its published work includes papers at SPIE and EMLC conferences, and the website references collaborations with Infinitesima and STMicroelectronics.

Product: Smart3, an AI software platform for metrology, defect inspection, simulation and process control, with LLM-based workflow creation and OEM/SDK licensing.

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