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DCA Instruments

Ultra-high vacuum deposition systems and MBE components for research labs and epiwafer producers worldwide

Turku, FinlandFounded 1989dca.fiWebsite technologies

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Highlights

  • New on EvolcAdded 2026-10-28

About DCA Instruments

DCA Instruments Oy designs and manufactures ultra-high vacuum (UHV) systems and components for molecular beam epitaxy (MBE), physical vapor deposition (PVD) and pulsed laser deposition (PLD). The range includes custom and production MBE systems, R&D MBE systems, substrate transfer systems, UHV sputtering systems, and MBE components such as manipulators, K-cells, crucibles and quartz crystal microbalances.

Its customers are research laboratories, universities and epiwafer producers working in oxide and compound semiconductor epitaxy. The company sells systems and components, and states that more than 300 UHV systems have been installed worldwide since its founding in 1989.

DCA Instruments was founded in 1989 and is headquartered in Turku, Finland. It introduced an automated UHV wafer transfer tool in 2004 and is ISO 9001:2015 approved. Its 300 mm (12-inch) production MBE systems are presented as SEMI-Fab compatible, and the company lists sales, manufacturing, mechanical engineering, software engineering and quality control among the areas it is interested in for open applications.

Product: Custom and production UHV deposition systems for MBE, PVD sputtering and PLD, plus MBE components such as manipulators, K-cells and quartz crystal microbalances.

Public tenders won

2 tenders won since 1 Jan 2024 from 2 public buyers in Finland, Sweden, worth €5.0M as awarded. From EU award notices (TED) that name DCA Instruments by its registry number.

  • 21 Sep 2026 TEKNOLOGIAN TUTKIMUSKESKUS VTT OY · Ultratyhjiössä toimiva ohutkalvodepositiojärjestelmä · €4.3M notice
  • 31 Oct 2024 Chalmers Tekniska Högskola Aktiebolag · Flexible pulsed laser deposition system · €699k notice

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