Beneq
Atomic layer deposition equipment and services for semiconductor, optics and research device makers
Highlights
- New on EvolcAdded 2026-10-31
About Beneq
Beneq builds atomic layer deposition (ALD) equipment, including Plasma-Enhanced ALD systems for research and production. Product lines include the Transform, Transmute and Prodigy series for semiconductor ALD, and the P Series, Spatial Series and TFS Series for advanced ALD.
Customers are device makers in semiconductor manufacturing, research and development, and optics, which the company describes as More-than-Moore device makers. The company sells ALD equipment together with service solutions.
Beneq Oy was founded in 2021 and is headquartered in Espoo, Finland, with legal entities in the USA and Japan. The website states that the company set up the first industrial ALD production in 1984, employs 170+ people on three continents, has 5 offices in the EU, Asia and North America, and has 400+ ALD tools installed worldwide.
Product: ALD and PE-ALD deposition systems for semiconductor, advanced ALD and research applications, with related services.
Public tenders won
5 tenders won since 1 Jan 2024 from 5 public buyers in Czechia, France, Italy, worth €1.5M as awarded. From EU award notices (TED) that name Beneq by its registry number.
- 30 Jun 2026 Univerzita Pardubice · Zařízení pro depozice atomárních vrstev – ALD III · €500k notice
- 12 Mar 2026 UNIVERSITA' DEGLI STUDI DI MODENA E REGGIO EMILIA · F6025 - PROCEDURA APERTA PER LAFFIDAMENTO DELLA FORNITURA DI UN SISTEMA DI ATOMIC LAYER DEPOSITION (ALD) PER LA DEPOSIZIONE DI MATERIALI A FILM SOTTILE PER LA FABBRICAZIONE DI DISPOSITIVI ELETTRONICI. · €292k notice
- 13 Jan 2026 CEA Grenoble · Fourniture et installation d'un équipement de dépôt ALD matériaux lithiés en 200mm · €1 notice
- 17 Dec 2024 UNIVERSITE DE TOURS · Mise à niveau (Upgrade) de l'équipement Beneq TFS 200-257 du Centre d'Etudes et de Recherche Technologiques en Microélectronique (CERTeM 5.0) · €303k notice
- 26 Nov 2024 Vysoké učení technické v Brně · Systém pro depozici atomárních vrstev (ALD) · €430k notice
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